Introduction
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Cross Sectional View |
This system is a customized version of PDS 2010 LABCOTER of SPECIALTY COATING SYSTEMS. The key parts are (1) the vaporizer, which vaporizes dimer Parylene, and (2) the pyrolysis furnace, which pyrolyze the dimer into monomer. When entering the cooled chamber, the monomer forms a conformal layer of Parylene polymer.
Parlyene's applications include gate dielectric material for organic thin film transistors, surface treatment layer between organic and inorganic materials, lithography protection layer, packaging material for OLED and solar cell, etc. With the system assembled into MBraun glovebox, we can realize all inert-gas operation of organic material processing, which is often oxygen and water sensitive.
For more material knowledge and instruments information, please visit:
http://www.scscoatings.com/index.aspx
This system is built by Zhang Jia, please contact him for more information. |
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Parylene CVD Process 101 (Parylene N as an example)
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Gallery
LabVIEW Front Pannel for CLUE Parylene CVD System Parylene CVD System Attached to MBraun Glovebox
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CLUE Parylene CVD System Control Box (Delta DTB4284RR Temperature/Pressure Controllers)
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